Detection of explosives using silicon microlevers

Abstract

Nowadays, there is a great interest to develop new microdevices that mimic mammalian olfaction system to carry out reliable trace chemical analysis of gas mixtures. Among the components of these “electronic noses”, zeolites and other nanoporous materials could play a crucial role due to their specific adsorption and catalytic properties. This paper deals with the design, simulation and fabrication of silicon microcantilevers modified with zeolites. In a step further, their deployment as mass sensors for nitroderivate- explosives detection has been successfully attempted. Some examples on o-nitrotoluene sensing at low ppm level highlight the benefits imposed by the use of zeolites as molecular recognition elements.